Specifications | Description |
Model Number | | 1. Kohzu's significant alpha-numeric model numbers offer quick product insight. |
Mirror Model Number | | 2. Mirror symmetry of standard stage. |
Table Size | | 3. Table size refers to the stage's valid mounting table size. |
Guide Mechanism | Cross-Roller Bearing | 4. Type of guide mechanism used on this stage.。 |
Angular Range | Coarse | 360° | 5. Stage travel range (coarse). |
Fine | ±3° | 6. Stage travel range (fine) in the positive and negative directions from it's centered or neutral position. |
Eccentricity | 15μm/360° | 7. Difference of rotation center while stage is rotating. |
Surface Runout | 15μm/360° | 8. Deviation of mounting stage surface while stage is rotating. |
Minimum Readout | Table | 1°/Scale | 9. Minimum readout of Table is the smallest measurable value of motion. |
Micrometor | 0.013°/Scale | 10. Minimum readout of Micrometer is the smallest measurable actuator motion increment at Micrometer or vernier scale. |
Moment Load Stiffness | 0.31 arcsec/N・cm | 11. Moment load stiffness is measured in a direction perpendicular to the motion axis. |
Load Capacity (Horizontal) | 98N(10kgf) | 12. Maximum load capacity is for a horizontally orientated stage with load centered on top-plate. |
Material | Aluminum Alloy | 13. Material specification is for stage's main body components only. |
Finish | Clear-Matt Anodizing | 14. Surface finish type and color. |
Weight | 0.42kg | 15. Stage weight includes all components depicted in product photograph. |
Actuator | Micrometer (6.5mm) | 16. Actuator model number and travel range. |
Price(JPY) | | 17. catalog price in Japanese currency |
Overhaul Price * | | 18. overhaul price in Japanese currency |
Clean Room Lubricant Change Price | | 19. Clean Room Lubricant change Price in Japanese currency. |
Vacuum Lubricant Change Price | | 20. Vacuum Lubricant change Price in Japanese currency |