| Model Number | | 1. Kohzu's significant alpha-numeric model numbers offer quick product insight. |
| Mirror Model Number | | 2. Mirror symmetry of standard stage... |
| Table Size | | 3. Table size refers to the stage's valid mounting table size. |
| Guide Mechanism | Cross-Roller Guide | 4. Type of guide mechanism used on this stage. |
| Motion Range | Coarce 13mm, Fine 0.3mm | 5. Stage travel range in the positive and negative directions from it's centered or neutral position. Fine Pitch Positioner types will indicate total coarse and fine travel ranges respectively. |
| Straightness | ≦2μm/13mm | 6. Straightness is measured relative to mounting surface. |
| Minimum Readout | Coarse 10μm/Scale, Fine 0.5μm/Scale | 7. Minimum readout is the smallest measurable value of motion. |
| Moment Load Stiffness | 0.2 arcsec/N・cm | 8. Moment load stiffness is measured in a direction perpendicular to the motion axis. |
| Load Capacity (Horizontal) | 53.9N(5.5kgf) | 9. Maximum load capacity is for a horizontally orientated stage with load centered on top-plate. |
| Material | Aluminum Alloy | 10. Material specification is for stage's main body components only. |
| Finish | Clear-Matte Anodizing | 11. Surface finish type and color. |
| Weight | 0.93kg | 12. Stage weight includes all components depicted in product photograph. |
| Perpendicularity | ≦20μm/13mm | 13. Perpendicularity (or orthogonality) between motion axes in a dual-axis XY stage assembly. |
| Actuator | Fine Pitch Positioner FPP03-13 (13mm) | 14. Actuator model number and travel range.。 |
| Price(JPY) | | 15. Catalog price in Japanese currency |
| Overhaul Price * | | 16. Overhaul price in Japanese currency |
| Clean Room Lubricant Change Price | | 17. Clean Room Lubricant change Price in Japanese currency. |
| Vacuum Lubricant Change Price | | 18. Vacuum Lubricant change Price in Japanese currency. |
