| Stage type | Stage model Number | Setting value(default:3) | Home position (origin) return method |
| X Linear Stage | XA04A-R101(-R) | 4 | Home position return method is determined with Home position sensor in motion range. |
| YA04A-R101 (-RRR) |
| XA04A-R2 (-R) |
| YA04A-R2 (-RRR) |
| XA07A-R2H (-R) |
| YA07A-R2H (-RRR) |
| XA10A-R2H (-R) |
| YA10A-R2H (-RRR) |
| XA16F-L21 (-R) | 1 | Home position return method is determined with zone (datum) sensor. |
| XA16F-L22 (-R) |
| XA16F-L23 (-R) |
| Vertical Stage | ZA04A-W1 | 7 or 8 | Home position return method is determined with limit sensor. |
| ZA05A-V1(Stop to order Product) | 4 | home position (origin) return method is determined with Home position sensor in motion range. |
| ZA05A-W1 |
| ZA05A-W2C |
| ZA07A-V1F |
| ZA10A-32F | 1 | Home position return method is determined with zone (datum) sensor. |
| ZA16A-32F |
| Rotation Stage | RA04A-W | 7 or 8 | Home position return method is determined with limit sensor. |
| Swivel (Tilt) Stage | SA04B-RT/M (-R) | 4 | home position return method is determined with Home position sensor in motion range. |
| SA05A-R2T/M/B/S/L (-R) |
| SA07A-R2T/M/B/S/L (-R) |
