Specifications | Description | |
Model Number | ZM07A-S3K | 1. Kohzu's significant alpha-numeric model numbers offer quick product insight. |
Mirror Model Number | ZM07A-S3K-R | 2. Mirror symmetry of standard stage |
Table Size | 70mm x 70mm | 3. Table size refers to the stage's valid mounting table size. |
Guide Mechanism | Cross-Roller Guide | 4. Type of guide mechanism used on this stage. |
Motion Range | ±3mm | 5. Stage travel range in the positive and negative directions from it's centered or neutral position.。 |
Vertically | ≦4μm/6mm | 6. Vertically is measured relative to mounting surface |
Minimum Readout | Coarse 5μm/Scale, Fine 0.25μm/Scale | 7. Minimum readout is the smallest measurable actuator motion increment. |
Load Capacity (Horizontal) | 29.4N(3kgf) | 8. Maximum load capacity is for a horizontally orientated stage with load centered on top-plate. |
Material | Aluminum Alloy | 9. Material specification is for stage's main body components only. |
Finish | Clear-Matt Anodizing | 10. Surface finish type and color. |
Weight | 0.9kg | 11. Stage weight includes all components depicted in product photograph. |
Actuator | Fine Pitch Positioner FPP03-13 (13mm) | 12. Actuator model number and travel range. |
Price(JPY) | ¥116,000 | 13. Catalog price in Japanese currency. |
Overhaul Price * | ¥24,000 ~ | 14. Overhaul price in Japanese currency |
Clean Room Lubricant Change Price | ¥18,000 | 15. Clean Room Lubricant change Price in Japanese currency. |
Vacuum Lubricant Change Price | ¥18,000 | 16. Vacuum Lubricant change Price in Japanese currency. |