| Specifications | Description |
| Model Number | | 1. Kohzu's significant alpha-numeric model numbers offer quick product insight. |
| Mirror Model Number | | 2. Mirror symmetry of standard stage |
| Table Size | | 3. Table size refers to the stage's valid mounting table size. |
| Guide Mechanism | Cross-Roller Guide | 4. Type of guide mechanism used on this stage. |
| Motion Range | ±3mm | 5. Stage travel range in the positive and negative directions from it's centered or neutral position.。 |
| Vertically | ≦4μm/6mm | 6. Vertically is measured relative to mounting surface |
| Minimum Readout | Coarse 5μm/Scale, Fine 0.25μm/Scale | 7. Minimum readout is the smallest measurable actuator motion increment. |
| Load Capacity (Horizontal) | 29.4N(3kgf) | 8. Maximum load capacity is for a horizontally orientated stage with load centered on top-plate. |
| Material | Aluminum Alloy | 9. Material specification is for stage's main body components only. |
| Finish | Clear-Matt Anodizing | 10. Surface finish type and color. |
| Weight | 0.9kg | 11. Stage weight includes all components depicted in product photograph. |
| Actuator | Fine Pitch Positioner FPP03-13 (13mm) | 12. Actuator model number and travel range. |
| Price(JPY) | | 13. Catalog price in Japanese currency. |
| Overhaul Price * | | 14. Overhaul price in Japanese currency |
| Clean Room Lubricant Change Price | | 15. Clean Room Lubricant change Price in Japanese currency. |
| Vacuum Lubricant Change Price | | 16. Vacuum Lubricant change Price in Japanese currency. |
